Fehleranalyse

Decapsulation

Frame based modules

  • Package + Si-gel removal
  • Polyimid removal

EMC-packages

  • Epoxy removal via laser and plasma

Laser

  • Coherent Easy Mark 5
  • LED-laser

Plasma

  • Pink V6-G
  • O2 and CF4 plasma etching
  • 300W microwave

Methodik

Optical analysis

  • Flir A655sc thermal camera
  • Keyence VHX-1000 digital microscope