Instrument Database

Surface Analytics

Dual Beam Helios G4 PFIB

MAPEX Instrument Database Logo

General information

  • Investigation area
  • Techniques
    Electron/Ion beam
  • Manufacturer
    ThermoFisher
  • Fabrication year
    2020
  • Measured quantity
    Surface topography, spatially resolved determination of chemical composition, determination of texture and crystal orientation; determination of surface chemical composition
  • Main application
    Imaging of the surface (including SE, BSE) with various additional detectors including STEM. Analysis by EDX, EBSD and ToF-SIMS. Ablation by ion beam incl. slicing and 3D imaging.
  • In-situ, real-time compatible
    Yes

Instrument specification

  • Technical aspects

    Various detectors including STEM detector, EDX detector, EBSD detector, ToF-SIMS detector, ion beam for material removal, production of TEM lamellae for further analysis, investigation of material volumes (3D reconstruction)
     

  • In-situ capabilities

Contact

Instrument location

  • Building
    LFM
  • Room
    0090
  • Institute
    IWT
Updated by: MAPEX