Bauteil Charakterisierung

Statische Charakterisierung

High Voltage Characterisation

• Sony Tektronix 370A and custom-made curve tracer
• Testing capabilities:
  • Voltages ≤ 10kV
  • Currents ≥ 1nA

High Current Characterisation

• Sony Tektronix 371A
• Custom made curve tracer
  • Power ≤ 3kW
  • Currents ≤ 400A

Low Voltage Characterisation

• Source-meter
• LCR-Meter
• Etc.

Dynamische Charakterisierung

Double Pulse Test Bench

• Equipment
  • Two 12-bit oscilloscopes (8 Channels total)
  • High resolution function generators
  • Custom made high bandwidth shunts
• Low power test bench
  • Voltages ≤ 2kV
  • Currents ≤ 200A
  • Temperatures ≤ 150°C
• High power test bench
  • Voltages ≤ 10kV
  • Currents ≤ 500A
  • Temperatures ≤ 250°C

SOA, Short Circuit, Zth

Charakterisierung auf der Wafer-/Chip-Ebene

Static High Voltage Characterisation

• Pressure vessel with nitrogen atmosphere

Deep Level Transient Spectroscopy

• Energetic position of dopants and “dirt” in Si, SiC, GaN, etc.