Publications research group Eickhoff
Reducing Degradation with Supported Geometry Wilken Seemann, Alexander Kothe, Christian Tessarek, Gesa Schmidt, Siqi Qiao, Nils von den Driesch, Jan Wiersig, Alexander Pawlis, Gordon Callsen, Jürgen Gutowski [...] Etching characteristics and mechanical properties of a-SiC:H thin films U. Schmid, M. Eickhoff, Ch. Richter, G. Krötz, D. Schmitt-Landsiedel Sensors and Actuators A: Physical 94 , 87 (2001) DOI : 10.1016/ [...] scientific.net/MSF.264-268.1101 Rapid plasma etching of cubic SiC using NF 3 /O 2 gas mixtures Christoph Richter, Klaus Espertshuber, Christoph Wagner, Martin Eickhoff, Gerhard Krötz Materials Science and Engineering: