Quantitative HAADF STEM of SiGe in presence of amorphous surface layers from FIB preparation
Tewes, Marco Schowalter , Knut Müller-Caspary, Florian F. Krause , Thorsten Mehrtens , Jean-Michel Hartmann, Andreas Rosenauer Ultramicroscopy (2018) 184 , 29-36 https://doi.org/10.1016/j.ultramic.2017.09