Atomic vs. sub-atomic layer deposition: impact of growth rate on the optical and structural properties of MoS₂ and WS₂
Christian Tessarek, TimGrieb, Florian F Krause, Christian Petersen, Alexander Karg, Alexander Hinz, Niels Osterloh, Christian Habben, Stephan Figge, Jon-Olaf Krisponeit , Thomas Schmidt, Jens Falta ,