Angle-resolved STEM using an iris aperture: Scattering contributions and sources of error for the quantitative analysis in Si
Müller-Caspary, Saleh Firoozabadi, Christoph Mahr , Marco Schowalter , Andreas Beyer, Oliver Oppermann , Kerstin Volz, Andreas Rosenauer Ultramicroscopy 221 (2021): 113175 https://doi.org/10.1016/j.ultramic.2020